Instruments and Systems: Monitoring, Control, and Diagnostics Annotation << Back Calculation of function of corrections at measurement of specific resistance by four-probe method A.A. ARESHKIN Functions of corrections for four probe techniques of control of specific resistance of thin leading films of the restricted sizes are defined at manufacture of elements of integral chips. Influence on measuring accuracy of specific resistance of thin films of distance of removal of the current probes from nonconducting boundary of the controllable sample is shown. Keywords: integral chips, control, specific resistance, specific surface resistance, thin films, the control four-probe method. Contacts: E-mail: ikd2004@mail.ru Pp. 41-45.