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Instruments and Systems: Monitoring, Control, and Diagnostics

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Modeling the thermal impact characteristics of thin film resistive-strain pressure sensors
Belozubov E.M., Vasil’yev V.A., Izmaylov D.A.

The article deals with modeling the thin film resistive-strain pressure sensors. Suggested model provides thermal fields calculations for sensing membrane and sensors’ output signal evaluation under thermal impact. It presents software algorithms allowing thermal impact characteristics modeling for sensors. It also cites investigation results for influence of ring groove in sensor’s resilient member on temperature distribution at membrane surface and on output signal in sensor’s bridge measuring circuit.

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