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Instruments and Systems: Monitoring, Control, and Diagnostics

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Minimization of transient temperatures influence on microelectromechanical systems implemented on the thin-film based resistive-strain pressure sensors
Belozubov E.M., Belozubova N.E., Vasiljev V.A.

The article observes the passive temperature protection methods for microelectromechanical systems (MEMS) implemented on the thin-film based resistive-strain pressure sensors. It suggests effective techniques and facilities compensating transient temperatures and describes some design decisions utilized in MEMS to protect them against temperature impact.

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