Instruments and Systems: Monitoring, Control, and Diagnostics Annotation << Back Nano- and microelectromechanical systems of thin-film gauges of pressure. The principles of building and prospects of researches Belozubov E.M., Vasiljev V.A. Principles of construction thin-film nano- and microelectromechanical systems (N&MEMS) gauges of pressure, basic types of designs N&MEMS are considered, their advantages are shown. Be directed are put on of perspective researches N&MEMS and gauges of pressure on their basis, on the decision of problems of increase of stability to influence non-stationary temperature and vibration. Key words: thin-film nano- and microelectromechanical systems, sensors of pressure, unstationaly temperature, promoted vibroacceleration. Контактный телефон: (8412) 36-82-61. E-mail: opto@bk.ru