Instruments and Systems: Monitoring, Control, and Diagnostics Annotation << Back Investigation of the Developed Interference Probe for Measuring the Irregularities of Real Surfaces A.V. AREFIEV, V.B. KOSKOVICH, E.E. MAIOROV, V.P. PUSHKINA, A.A. SOROKIN, S.V. UDAKHINA This article to the study of the developed interference probe for measuring the irregularities of real surfaces is devoted. Improving the functionality and information content of measurements for an interference probe is an important task for optical instrumentation, so the work is relevant. The article presents a scheme of experimental studies of the object’s surface and describes its operation. The requirements for the scanning parameters are determined and it is obtained that the speed of the reference mirror is 390 mm/s when the object is moving 100 mm/s. The experimental results of the correlation function dependence on the transverse motion of the object surface under study are presented, which show that the measurements can be considered independent when the object is moved in the transverse direction with a measurement step of 9 microns. Keywords: metrology, interference probe, test surface, interferometer arms, correlation function, measurement step, angle of incidence. DOI: 10.25791/pribor.2.2022.1319 Pp. 01-06.