Instruments and Systems: Monitoring, Control, and Diagnostics Annotation << Back Research of Compensation Acceleration Transducer With Differential Optical Reading V.I. BUSURIN, S.G. SHTEK, V.V. KOROBKOV, M.A. ZHEGLOV, K.A. KOROBKOV The paper considers a compensation acceleration transducer with differential optical reading. A functional diagram is developed and an algorithm for functioning of compensation micro-opto-electromechanical acceleration transducer is proposed. An electromagnetic feedback loop prevents mechanical contact between optical parts and can be used to calibrate the transducer. Mathematical models have been developed to research static and dynamic characteristics of the acceleration transducer. The differential connection type of two optical modulators is used and nonlinearity error of reading unit is shown. Reflectivity and sensitivity dependences of modulator basis on effect optical tunneling on gap when changing refractive indexes of a mediums are researched. The influence of gap between sensitive element and transducer body on system without feedback dynamics has been researched. The behavior of a closed-loop system with varying values of the feedback coefficient is researched. Keywords: compensation acceleration transducer, microelectromechanical systems, optical reading, optical tunneling effect, error, sensitive element stabilization. DOI: 10.25791/pribor.3.2021.1247 Pp. 29-38.