Instruments and Systems: Monitoring, Control, and Diagnostics Annotation << Back Combined Stabilization Method for Sensitive Element of Compensation Acceleration Transducer With Optical Reading V.I. BUSURIN, V.V. KOROBKOV, K.A. KOROBKOV, L.A. SHLEENKIN The paper proposes combined stabilization method for sensitive element of microelectromechanical compensation acceleration transducer with optical reading. Structural diagram of compensation microoptoelectromechanical linear acceleration transducer with combined stabilization method for sensitive element has been developed. General view and algorithm that allows to effectively use a combination of two different types of compensation feedbacks: electromagnetic and electrostatic; are proposed. The combined stabilization method for sensitive element simultaneously returns it to the resting position and dampens vibrations. The proposed combined stabilization method for sensitive element position, together with the operation algorithm and multi-mode control, allows: to ensure the operation of the transducer at various types of input accelerations, to expand the range of measured accelerations without deteriorating the accuracy characteristics and exclude mechanical contact between transducer elements. Modeling has been carried out, which has shown the effectiveness of using the proposed method. Keywords: compensation acceleration transducer, microelectromechanical systems, optical reading, optical tunneling effect, stabilization method, sensitive element stabilization. DOI: 10.25791/pribor.10.2020.1211 Pp. 05-13.