Instruments and Systems: Monitoring, Control, and Diagnostics Annotation << Back 3-D coordinate measuring machine “3D NANO CMM” B.G. TURUKHANO, E.A. VILKOV, V.V. DOBYRN, O.G. ERMOLENKO, L.A. KONSTANTINOV, V.E. KORMIN, YU. M. LAVROV, R.P. SINEL`SHCHIKOVA, V.G. TOLCHIN, N. TURUKHANO, S.N. KHANOV, N.A. SHCHIPUNOVA A new concept of coordinate measuring machine 3D NANO CMM, which uses 4 measurement system (MS), which have their 3D CMM Nano, which uses 4 measurement system (MS), which have their original, precise, self-contained guide to the two bonded glass substrates. MS-based high-precision ultraprecision metrological holographic diffraction gratings. To eliminate the strain when moving heavy diabase bridge, the latter is designed as a lightweight, glass construction. Tests have confirmed the optimal design and software solutions. Keywords: ultraprecision holographic linear encoder (LEH), a linear metrological ultraprecision holographic grating (MHG), the 3D coordinate measuring machine “3D NANO CMM”. Contacts: E-mail: dir@pnpi.spb.ru Pp. 44-52.