Instruments and Systems: Monitoring, Control, and Diagnostics Annotation << Back Automated ultraprecision length gauges holographic with touch encoder DG DK-200 B.G. TURUKHANO, E.A. VILKOV, V.V. DOBYRN, O.G. ERMOLENKO, L.A. KONSTANTINOV, I.V. LADATKO, V.G. TOLCHIN, N. TURUKHANO, S.N. KHANOV, N.A. SHCHIPUNOVA In an age of nanotechnology idea of fast and accurate measurement of products with a minimum of external influences on the measured object it is becoming increasingly important, which ultimately leads to an increase in the accuracy of positioning of the product. This paper describes the principle of operation and automated ultraprecision device touch probe holographic (PH) with mild (“soft”) touch sensor (TS) within the measurement 0 ÷ 200 mm, with an accuracy of ±0,3 mkm throughout the length and speed measurement and information processing to 500 mm/s. Keywords: holographic diffraction grating, automated ultraprecision length gauges holographic with touch probe holographic, the touch sensor, length encoder. Contacts: E-mail: dir@pnpi.spb.ru Pp. 35-43.