Instruments and Systems: Monitoring, Control, and Diagnostics Annotation << Back
Modernization of universal three-coordinaqte nanomeasuring microscope (3D NANO UIM) |
B.G. TURUKHANO, E.A. VILKOV, V.V. DOBYRN, O.G. ERMOLENKO, M.O. IVANOV, YU. M. LAVROV, I.V. LADATKO, V.G. TOLCHIN, N. TURUKHANO, S.N. KHANOV, N.A. SHCHIPUNOVA
The article deals with issues of improving metrological precision universal measuring microscopes, in particular, for account of equipping existing instruments holographic precision encoders, increasing the number of measured coordinates, using a computer, special software and new electronic and mechanical components.
Keywords: holographic diffraction grating, linear holographic encoders, length gauge, universal measuring microscope, NANOmeasuring systems, nanomeasurement.
Contacts: E-mail: dir@pnpi.spb.ru
Pp. 21-27. |
|
|