Instruments and Systems: Monitoring, Control, and Diagnostics Annotation << Back Method for probing the resistivity of thin films utilized in integrated circuits with probes positioned in the vertexes or rectangle A.A. ARESHKIN The method for probing the resistivity of highly resistive, semiconducting and conducting thin films with probes positioned in the vertexes of rectangle has been developed and implemented. General analytical expressions for resistivity evaluation, method sensitivity and error estimate has been derived. Keywords: probe methods of control, four-probe method, integrated circuits, resistivity, surface resistivity, monitoring sensors. Contacts: - Pp. 69-73.