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Method of compensation of the supplementary error of measurement of parameters of the microrelief on the basis of the use of the optic-electronic complex |
A.D. ABRAMOV, A.I. NIKONOV
In this article is offered method of compensation of the supplementary error, wich appears as result of the value of reference incident light deviation, by the optic-electronic means. Method based on the determination of autocorrelative function at the estimation of vision surface microgeometry. Key worlds: method, optic-electronic complex, measurement, convertes, surface, reference incident light, image, error, compensation, autocorrelation.
E-mail: esib@samgtu.ru, nikonovai@mail.ru |
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