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Instruments and Systems: Monitoring, Control, and Diagnostics

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Method of compensation of the supplementary error of measurement of parameters of the microrelief on the basis of the use of the optic-electronic complex
A.D. ABRAMOV, A.I. NIKONOV

In this article is offered method of compensation of the supplementary error, wich appears as result of the value of reference incident light deviation, by the optic-electronic means. Method based on the determination of autocorrelative function at the estimation of vision surface microgeometry. Key worlds: method, optic-electronic complex, measurement, convertes, surface, reference incident light, image, error, compensation, autocorrelation. E-mail: esib@samgtu.ru, nikonovai@mail.ru

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