Instruments and Systems: Monitoring, Control, and Diagnostics Annotation << Back Control of specific resistance of thin film elements of the microstrip microwave of devices A.A. ARESHKIN The four-probe method of control of specific resistance of thin films of the microstrip microwave of devices with the linear layout of probes in sensors is considered. Analytical dependences of measurement of specific resistance of thin films are installed at various layout of probes in sensors. The estimation of sensitivity and accuracy of sensors from times is given by personal layout of probes. Keywords: integral chips of the microwave oven, manufacturing techniques of integrated circuits, control, specific resistance, specific surface resistance, the microwave oven of loss, the microstrip microwave ovens of the device, the control four-probe method. Contacts: E-mail: ikd2004@mail.ru Pp. 24-28.