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Instruments and Systems: Monitoring, Control, and Diagnostics

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Modeling the State of Technological Equipment as Part of an Information and Control System
YU.S. SHEVNINA

The article presents an approach to modeling the state of technological equipment that is part of the information and control system
of a manufacturing enterprise. The developed model of the state of technological equipment makes it possible to take into account many
external and internal parameters: the technical condition of the equipment, the state of the external environment, and the human factor. To
study the relationship and nonlinearity parameters affecting the state and behavior of technological equipment, a neural network model with
backpropagation of errors was used. The verifi cation of the algorithmic model of the state of technological equipment, carried out for a
vacuum installation, is included in the lithograph for microelectronics. Four main factors infl uencing the effi ciency of vacuum installation
control were chosen as input parameters: air fl ow into the vacuum installation chamber, degree of vacuum, pressure in the installation
chamber and pump power.
The results of the study show that the model developed by the authors allows us to refl ect the main features of changes in the state
of technological equipment, taking into account the proposed parameters. Although the model can be improved by using more data, the
described approach to modeling the state of process equipment as part of the information and control system of a manufacturing enterprise
has proven its validity and effectiveness.
Keywords: state modeling, neural network, equipment technology management, information and control systems.


DOI: 10.25791/pribor.1.2024.1468


Pp. 29-35.

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